On the Record · Onto Innovation
Onto Innovation subsidiaries, as it lists them
The subsidiaries Onto Innovation lists in its latest annual report, with the jurisdiction of each, linked to the filing.
Subsidiaries it lists
| Subsidiary | Jurisdiction |
|---|---|
| Rudolph Technologies, Inc. | U.S.A. |
| 4D Technology Corporation | U.S.A. |
| Inspectrology LLC | U.S.A. |
| Lumina Instruments Inc. | U.S.A |
| Semilab USA LLC | U.S.A |
| Onto Innovation Japan Co. Ltd. | Japan |
| Onto Innovation (Shanghai) Trading Co., Ltd. | China |
| Onto Innovation Germany GmbH | Germany |
| Onto Innovation Hong Kong Limited | Hong Kong |
| Onto Innovation Europe, B.V. | Netherlands |
| Onto Innovation Switzerland GmBH | Switzerland |
| Onto Innovation Korea Ltd. | Korea |
| Onto Innovation Southeast Asia Pte. Limited | Singapore |
| Onto Innovation Ireland Limited | Ireland |
| Onto Innovation Malaysia Sdn. Bhd. | Malaysia |
| Onto Innovation Vietnam PTE Company Limited | Vietnam |
| Neta SAS | France |
| Liteq B.V. | Netherlands |
From Exhibit 21 of the 10-K for 2026. Companies must list their significant subsidiaries there and may leave out smaller ones, so this is the company’s own list, not every entity it owns.
Read from Onto Innovation’s annual reports (10-K for 2026, 10-K for 2024, 10-K for 2023) and the financial data it files with the SEC, as of 2026-02-24. Every quotation is word for word from the filing linked beside it; how these pages are built and checked. The full record is in its company data sheet.