On the Record · Onto Innovation
Onto Innovation acquisitions, on the record
The businesses Onto Innovation bought and sold, as its annual reports describe them, with the cash it reported paying for acquisitions each year and every deal filing since 2016.
Deals its annual reports describe
| Business | Deal | When | Value |
|---|---|---|---|
Nanometrics Incorporated and Rudolph Technologies, Inc. (2019 Merger)Word for word“On October 25, 2019, we became Onto Innovation Inc. upon the effectiveness of the merger (the “2019 Merger”) between Nanometrics Incorporated (“Nanometrics”) and Rudolph Technologies, Inc. (“Rudolph”).” 10-K for 2023 | merger | October 25, 2019 | — |
Businesses acquired in fiscal 2022 and 2021 (not named in the filing)Word for word“Net cash paid for acquisitions in fiscal 2022 and 2021 were $4.6 million and $23.8 million, respectively.” 10-K for 2023 | acquisition | fiscal 2022 and 2021 | $4.6 million and $23.8 million |
Lumina Instruments Inc.Word for word“During the fourth quarter of 2024, the Company acquired Lumina Instruments Inc. (“Lumina”), to strengthen Onto Innovation’s inspection portfolio through the addition of Lumina’s highly differentiated laser based optical defect inspection technology .” 10-K for 2024 | acquisition | During the fourth quarter of 2024 | — |
Semilab USA LLCWord for word“On November 17, 2025 (the “Acquisition Date”), the Company completed the previously announced acquisition of Semilab USA LLC (“Semilab USA”), pursuant to the Equity Purchase Agreement (the “Purchase Agreement”), dated as of June 27, 2025, by and among the Company, Semilab International Zrt. (the “Seller”), Semilab Zrt. and Semilab USA, as amended by the Amendment to Equity Purchase Agreement, dated October 9, 2025.” 10-K for 2026 | acquisition | On November 17, 2025 | — |
| Fiscal year ended | Cash paid for acquisitions (net of cash acquired) | Goodwill from acquisitions |
|---|---|---|
| 2018-12-29 | $37.2 million | — |
| 2018-12-31 | — | $0 |
| 2019-12-31 | — | $284.7 million |
| 2020-12-26 | $0 | — |
| 2022-01-01 | $23.8 million | — |
| 2022-12-31 | $4.6 million | — |
| 2023-12-30 | $0 | $0 |
| 2024-12-28 | $26.8 million | — |
| 2026-01-03 | $436.1 million | — |
Deal filings since 2016
- 2026-08-10 Form 8-K, Item 2.01: Completion of Acquisition or Disposition of Assets
- 2026-05-21 Form 8-K, Item 1.01: Entry into a Material Definitive Agreement
- 2026-04-21 Form 8-K, Item 1.01: Entry into a Material Definitive Agreement
- 2025-11-17 Form 8-K, Item 2.01: Completion of Acquisition or Disposition of Assets
- 2025-10-10 Form 8-K, Item 1.01: Entry into a Material Definitive Agreement
- 2025-06-30 Form 8-K, Item 1.01: Entry into a Material Definitive Agreement
- 2019-10-28 Form 8-K, Item 2.01: Completion of Acquisition or Disposition of Assets
- 2019-06-24 Form 8-K, Item 1.01: Entry into a Material Definitive Agreement
- 2018-10-29 Form 8-K, Item 1.01: Entry into a Material Definitive Agreement
Read from Onto Innovation’s annual reports (10-K for 2026, 10-K for 2024, 10-K for 2023) and the financial data it files with the SEC, as of 2026-02-24. Every quotation is word for word from the filing linked beside it; how these pages are built and checked. The full record is in its company data sheet.