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On the Record · Axcelis Technologies

Axcelis Technologies subsidiaries, as it lists them

The subsidiaries Axcelis Technologies lists in its latest annual report, with the jurisdiction of each, linked to the filing.

Subsidiaries it lists

SubsidiaryJurisdiction
Axcelis Technologies, Inc.—
Axcelis Technologies (Israel) Inc.Delaware corporation
Victory Merger Sub, Inc.Delaware corporation
Axcelis Technologies GmbH (Germany)Germany
Axcelis Technologies, Srl (Italy)Italy
Axcelis Technologies, Sarl (France)France
Axcelis Technologies, KK (Japan)Japan
Axcelis Technologies Limited (Korea)Korea
Axcelis Technologies, Ltd. (Taiwan)Taiwan
Axcelis Technologies Pte. Ltd. (Singapore)Singapore
Axcelis Technologies Semiconductor Trading (Shanghai) Co., Ltd. (Peoples Republic of China)Peoples Republic of China

From Exhibit 21 of the 10-K for 2025. Companies must list their significant subsidiaries there and may leave out smaller ones, so this is the company’s own list, not every entity it owns.

Read from Axcelis Technologies’s annual reports (10-K for 2025, 10-K for 2024, 10-K for 2023) and the financial data it files with the SEC, as of 2026-02-26. Every quotation is word for word from the filing linked beside it; how these pages are built and checked. The full record is in its company data sheet.